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4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

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4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

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Brand Name : ZMSH

Model Number : 4 Inch Quartz Wafer

Certification : rohs

Place of Origin : CHINA

MOQ : 10

Price : by case

Payment Terms : T/T

Supply Ability : 1000pcs per month

Delivery Time : 5-8weeks

Packaging Details : Package in 100-grade cleaning room

Diameter : 4 inch (100mm)

Thickness Range : 0.5mm~1.5mm

Surface Roughness (Polished) : ≤0.5nm

Transmittance @193nm : >93%

CTE (20-300°C) : 0.55×10⁻⁶/°C

Parallelism : ≤3μm

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Core Introduction of 4inch quartz wafer

4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing

4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer for Semiconductor Manufacturing

The 4-inch quartz wafer (100mm) is a large-format, ultra-high-purity fused silica substrate designed for high-precision, high-stability applications in semiconductors, optoelectronics, and advanced optics. Compared to 3-inch wafers, the 4-inch specification offers significantly greater usable area, improving production efficiency—particularly for batch manufacturing of IC photomasks, high-power laser optics, and MEMS sensors.

ZMSH specializes in the R&D and production of 4-inch and larger quartz wafers, offering:

- Full-size customization: Supports 4-inch, 6-inch, and 8-inch wafers, with non-standard sizes (e.g., square, sector-shaped) available.

- High-precision processing: Includes double-side ultra-polishing (Ra≤0.5nm), laser dicing (±0.01mm tolerance), and micro-hole/special-shaped via drilling.

- Functional treatments: Anti-reflective (AR) coatings, IR anti-reflection, diamond-like carbon (DLC) coatings, and more.

- Industry-grade solutions: Semiconductor-level cleanliness (Class 10), low defect density (≤0.1/cm²), ideal for EUV lithography and quantum computing.


Specification for 4inch quartz wafer

Technical Term Specification
Diameter 4 inch (100mm)
Thickness Range 0.5mm~1.5mm
Surface Roughness (Polished) ≤0.5nm
Transmittance @193nm >93%
CTE (20-300°C) 0.55×10⁻⁶/°C
Parallelism ≤3μm
Vacuum Compatibility 10⁻¹⁰ Torr


​​Key Characteristics​​ of 4inch quartz wafer

1. Large-size precision: TTV≤10μm at 100mm diameter ensures process uniformity.

2. Ultra-low CTE: 0.55×10⁻⁶/°C, suitable for high-temperature processes (e.g., annealing, ion implantation).

3. Broadband transparency: >93% transmittance @193nm (DUV), >90% @3-5μm (IR).

4. Superior surface quality: Double-side polished with Ra≤0.5nm for nanoscale lithography.

5. Enhanced durability: Optional chemical strengthening boosts flexural strength to 600MPa; plasma-resistant.


​​Strategic Applications​ of 4inch quartz wafer

Field Applications
Semiconductor EUV lithography optics, photomask substrates, 3D NAND interposers
High-power Lasers Laser mirrors, pulse compression gratings, fiber laser endcaps
Quantum Technology Qubit chip carriers, cold atom trap viewports, single-photon detector substrates
Aerospace Satellite lenses, radiation-resistant sensor windows, particle detectors
Biomedical DNA sequencing chips, endoscope optics, microfluidic device molds

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Customization Services

ZMSH provides end-to-end customization for 4-inch quartz wafers, including:

- Material selection: JGS1/JGS2 UV-grade or IR-grade fused silica.

- Precision machining: Nanoscale polishing (λ/20), laser microstructuring (±1μm accuracy).

- Functional coatings: AR (193-1064nm), high-LIDT laser coatings (>5J/cm²).

- QA support: Full inspection reports (AOI, interferometry).

4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing


FAQ

1. Q: What is the typical thickness tolerance for 4-inch quartz wafers?

A: Standard 4-inch (100mm) quartz wafers maintain ±0.02mm thickness tolerance across the 0.5-1.5mm range, ensuring uniformity for semiconductor lithography processes.

2. Q: Why choose 4-inch over 6-inch quartz wafers for MEMS applications?

A: 4-inch wafers provide optimal cost-efficiency for small-to-medium MEMS production runs while maintaining better process control than smaller diameters.

Tag: #3 Inch Quartz Substrate, #Customized, #Fused Silica Plates, #SiO₂ Crystal, #Quartz wafers, #JGS1/JGS2 Grade, # High-Purity, #Fused Silica Optical Components, #Quartz Glass Plate, #Custom-Shaped Through-Holes​​, #4Inch Quartz Wafer, #Diameter 100mm, #Semiconductor Manufacturing

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Product Tags:

4 Inch Fused Silica Wafer

      

Fused Silica Wafer for Semiconductor

      

100mm Fused Silica Wafer

      
 4Inch Quartz Wafer Diameter 100mm Fused Silica Wafer For Semiconductor Manufacturing Manufactures

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